US 12,325,081 B2
Method for separating a plurality of slices from workpieces by means of a wire saw during a sequence of separation processes
Axel Beyer, Seoul (KR); Carl Frintert, Muehldorf am Inn (DE); and Peter Wiesner, Reut (DE)
Assigned to SILTRONIC AG, Munich (DE)
Appl. No. 17/928,933
Filed by Siltronic AG, Munich (DE)
PCT Filed Jun. 7, 2021, PCT No. PCT/EP2021/062691
§ 371(c)(1), (2) Date Dec. 1, 2022,
PCT Pub. No. WO2021/249719, PCT Pub. Date Dec. 16, 2021.
Claims priority of application No. 20179134 (EP), filed on Jun. 10, 2020.
Prior Publication US 2023/0226629 A1, Jul. 20, 2023
Int. Cl. B23D 57/00 (2006.01); B23D 59/00 (2006.01); B23D 59/04 (2006.01); B28D 5/00 (2006.01); B28D 5/04 (2006.01)
CPC B23D 57/0023 (2013.01) [B23D 57/0053 (2013.01); B23D 59/001 (2013.01); B23D 59/04 (2013.01); B28D 5/0064 (2013.01); B28D 5/045 (2013.01)] 4 Claims
OG exemplary drawing
 
1. A method for cutting a multiplicity of slices, using a wire saw, from workpieces during a sequence of cut-off operations, which are divided into initial cuts and follow-on cuts, the wire saw comprising a wire array of moveable wire sections of a saw wire and an actuating device, and the wire array being tensioned in a plane between two wire guide rollers, each of the two wire guide rollers being supported between a fixed bearing and a floating bearing, the method comprising:
during each of the cut-off operations, feeding a respective workpiece using the actuating device through the wire array along a feed direction perpendicular to a workpiece axis and perpendicular to the plane of the wire array in a presence of a working fluid and hard materials, which act abrasively on the workpiece, the feeding of the respective workpiece further comprising:
during each of the cut-off operations, feeding the respective workpiece through the wire array with simultaneous axial movement of the floating bearings by adjusting the temperature of the fixed bearings with a cooling fluid in accordance with a specification of a temperature profile, which specifies the temperature of the cooling fluid in dependence on a depth of cut and correlates with a first correction profile, which specifies the travel of the floating bearings in dependence on the depth of cut; and
feeding the workpiece through the wire array while simultaneously moving the workpiece along the workpiece axis by an actuating element in accordance with the specification of a second correction profile, which specifies the travel of the workpiece, the first correction profile and the second correction profile being opposed to a shape deviation; and
determining the shape deviation during each of the cut-off operations and/or before each of the cut-off operations, wherein determining the shape deviation during each of the cut-off operations comprises measuring the shape deviation by comparing the position of a line through a center of at least one kerf with a position of a reference trajectory, wherein determining the shape deviation before each of the cut-off operations comprises determining the shape deviation by a comparison of an average shape profile of already cut-off slices with a reference shape profile.