US 12,325,017 B2
Photoelectric fluid field cluster catalytic method for atomic-scale deterministic processing
Wule Zhu, Hangzhou (CN); Sidong Wu, Hangzhou (CN); Qi Sun, Hangzhou (CN); Fang Han, Hangzhou (CN); Wei Gao, Hangzhou (CN); Caoyang Xue, Hangzhou (CN); Xiang Zhao, Hangzhou (CN); Bingchun Jia, Hangzhou (CN); Jingyuan Wang, Hangzhou (CN); Weijian Zhang, Hangzhou (CN); and Bingfeng Ju, Hangzhou (CN)
Assigned to Zhejiang University, Hangzhou (CN)
Filed by Zhejiang University, Hangzhou (CN)
Filed on Jan. 9, 2025, as Appl. No. 19/015,383.
Claims priority of application No. 202410186779.4 (CN), filed on Feb. 20, 2024.
Prior Publication US 2025/0144609 A1, May 8, 2025
Int. Cl. B24B 1/00 (2006.01); B01J 35/33 (2024.01); B01J 35/39 (2024.01); B01J 35/45 (2024.01); B01J 37/02 (2006.01); B24B 37/04 (2012.01); C09G 1/00 (2006.01); C09G 1/02 (2006.01); C09G 1/04 (2006.01); C09G 1/06 (2006.01); H01L 21/306 (2006.01); H01L 21/321 (2006.01)
CPC B01J 35/39 (2024.01) [B01J 35/33 (2024.01); B01J 35/45 (2024.01); B01J 37/0215 (2013.01); B24B 1/00 (2013.01); B24B 37/04 (2013.01); B24B 37/042 (2013.01); B24B 37/044 (2013.01); B24B 37/046 (2013.01); C09G 1/00 (2013.01); C09G 1/02 (2013.01); C09G 1/04 (2013.01); C09G 1/06 (2013.01); H01L 21/30625 (2013.01); H01L 21/3212 (2013.01); H01L 21/32125 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A photoelectric fluid field cluster catalytic method for atomic-scale deterministic processing, comprising the following steps:
S1, selecting nanoparticles with photocatalytic activity as a photocatalytic medium, and using a photoreduction method to realize a precipitation of metal nanoparticles on a surface of the photocatalytic medium, thus creating photoelectrocatalytic clusters;
S2, mixing the photoelectrocatalytic clusters with deionized water to prepare a polishing solution;
S3, illuminating a coupling area between a surface to be processed of a workpiece, the photoelectrocatalytic clusters and a flexible tool with a catalytic light source, and simultaneously applying a bias voltage to a conductive tray of the workpiece to control a potential of the workpiece and form a spatial electric field between the photoelectrocatalytic clusters and the workpiece; and
S4, applying a load to a flexible tool head and setting a rotation speed to generate a hydrodynamic pressure that maintains a gap between the tool head and the workpiece surface, and driving the polishing solution in the gap to flow through a flow field, thus enabling controllable removal with atomic-level precision under an interfacial synergistic photoelectrocatalytic effect.