US 12,324,909 B2
Neural electrode based on three-dimensional structure of flexible substrate, and manufacturing method therefor
Sohee Kim, Daegu (KR); Yoona Kang, Daegu (KR); and Namju Kim, Daegu (KR)
Assigned to DAEGU GYEONGBUK INSTITUTE OF SCIENCE AND TECHNOLOGY, Daegu (KR)
Appl. No. 17/611,273
Filed by DAEGU GYEONGBUK INSTITUTE OF SCIENCE AND TECHNOLOGY, Daegu (KR)
PCT Filed Nov. 2, 2020, PCT No. PCT/KR2020/015172
§ 371(c)(1), (2) Date Nov. 15, 2021,
PCT Pub. No. WO2021/101125, PCT Pub. Date May 27, 2021.
Claims priority of application No. 10-2019-0148128 (KR), filed on Nov. 18, 2019.
Prior Publication US 2022/0339431 A1, Oct. 27, 2022
Int. Cl. A61N 1/04 (2006.01); A61B 5/24 (2021.01); A61B 5/257 (2021.01); A61B 18/00 (2006.01); A61N 1/05 (2006.01)
CPC A61N 1/0496 (2013.01) [A61B 5/24 (2021.01); A61B 5/257 (2021.01); A61N 1/0529 (2013.01); A61B 2018/00136 (2013.01); A61B 2562/125 (2013.01)] 4 Claims
OG exemplary drawing
 
1. A neural electrode based on a three-dimensional structure of a flexible substrate, comprising:
a flexible first polymer layer made of a polymer material and functioning as a base;
a three-dimensional structure of photoresist part disposed on one portion of a surface of the first polymer layer;
a second polymer layer disposed on the rest of the surface of the first polymer layer and the three-dimensional structure, and including a protrusion part formed by the three-dimensional structure;
a metal thin film layer formed by patterning a metal thin film on a surface of the second polymer layer and a surface of the protrusion part; and
a third polymer layer disposed on the surface of the second polymer layer and the metal thin film layer to function as a covering, and including a measurement hole that exposes one portion of the metal thin film layer disposed on an end of the protrusion part to the outside.