CPC H10K 71/166 (2023.02) [C23C 14/042 (2013.01)] | 12 Claims |
1. A method of manufacturing a display device, the method comprising:
arranging a display substrate in a chamber,
arranging a mask assembly in the chamber; and
supplying a deposition material to the mask assembly by a deposition source,
wherein the arranging of the mask assembly comprises:
disposing a stopping layer including a stopping layer opening on a first mask layer;
disposing an inorganic layer on the stopping layer;
forming a first mask opening in the first mask layer; and
forming an inorganic opening of the inorganic layer by etching the inorganic layer corresponding to the stopping layer opening.
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