US 12,004,413 B1
Apparatus and method for manufacturing a display device
Jeongkuk Kim, Yongin-si (KR); Heemin Park, Yongin-si (KR); Duckjung Lee, Yongin-si (KR); and Sungsoon Im, Yongin-si (KR)
Assigned to SAMSUNG DISPLAY CO., LTD., Yongin-si (KR)
Filed by Samsung Display Co., Ltd., Yongin-si (KR)
Filed on Oct. 2, 2023, as Appl. No. 18/479,202.
Claims priority of application No. 10-2023-0038985 (KR), filed on Mar. 24, 2023; and application No. 10-2023-0052822 (KR), filed on Apr. 21, 2023.
Int. Cl. H10K 71/16 (2023.01); C23C 14/04 (2006.01)
CPC H10K 71/166 (2023.02) [C23C 14/042 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A method of manufacturing a display device, the method comprising:
arranging a display substrate in a chamber,
arranging a mask assembly in the chamber; and
supplying a deposition material to the mask assembly by a deposition source,
wherein the arranging of the mask assembly comprises:
disposing a stopping layer including a stopping layer opening on a first mask layer;
disposing an inorganic layer on the stopping layer;
forming a first mask opening in the first mask layer; and
forming an inorganic opening of the inorganic layer by etching the inorganic layer corresponding to the stopping layer opening.