US 12,004,353 B2
Semiconductor devices including a contact structure that contacts a dummy channel structure
Joo Won Park, Hwaseong-si (KR); Kyeong Jin Park, Hwaseong-si (KR); and Kwang Soo Kim, Hwaseong-si (KR)
Assigned to Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed by Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed on Apr. 12, 2023, as Appl. No. 18/299,150.
Application 18/299,150 is a continuation of application No. 17/495,320, filed on Oct. 6, 2021, granted, now 11,659,713.
Application 17/495,320 is a continuation of application No. 16/451,385, filed on Jun. 25, 2019, granted, now 11,145,669, issued on Oct. 12, 2021.
Claims priority of application No. 10-2018-0158769 (KR), filed on Dec. 11, 2018.
Prior Publication US 2023/0309312 A1, Sep. 28, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. H10B 43/40 (2023.01); H01L 23/535 (2006.01); H10B 43/27 (2023.01)
CPC H10B 43/40 (2023.02) [H01L 23/535 (2013.01); H10B 43/27 (2023.02)] 20 Claims
OG exemplary drawing
 
1. A semiconductor device comprising:
a substrate having a cell region and a connection region adjacent to the cell region;
a stacked structure in which a plurality of insulating layers and a plurality of electrode layers are alternately stacked on the substrate;
a source mold layer between the substrate and the stacked structure in the connection region;
an alternate conductive line between the substrate and the stacked structure in the cell region;
a plurality of cell channel structures in the cell region, the plurality of cell channel structures extending into the alternate conductive line while passing through the stacked structure;
a plurality of extension structures in the connection region, the plurality of extension structures extending into the source mold layer while passing through the stacked structure; and
a contact structure that is among the plurality of extension structures in the connection region while being in direct contact with one of the plurality of electrode layers,
wherein each of the plurality of cell channel structures comprises:
a channel pattern, and
an information storage pattern outside the channel pattern,
wherein the channel pattern is electrically connected to the alternate conductive line, and
wherein the plurality of extension structures are not electrically connected to the alternate conductive line.