US 12,004,337 B2
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
Gayatri Natu, Mumbai (IN); Geetika Bajaj, Mumbai (IN); Prerna Goradia, Mumbai (IN); Darshan Thakare, Thane West (IN); David Fenwick, Los Altos Hills, CA (US); XiaoMing He, Fremont, CA (US); Sanni Seppaelae, Karlstein am Main (DE); Jennifer Sun, Fremont (DE); Rajkumar Thanu, Santa Clara, CA (US); Jeff Hudgens, Fremont, CA (US); Karuppasamy Muthukamatchy, Bangalore (IN); and Arun Dhayalan, Austin, TX (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Nov. 10, 2022, as Appl. No. 17/985,065.
Application 17/985,065 is a continuation of application No. 16/890,336, filed on Jun. 2, 2020, granted, now 11,540,432.
Claims priority of application No. 201941038863 (IN), filed on Sep. 26, 2019.
Prior Publication US 2023/0077895 A1, Mar. 16, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. H05K 9/00 (2006.01); H01J 37/20 (2006.01); H01J 37/32 (2006.01); H01L 21/687 (2006.01); H05F 1/02 (2006.01)
CPC H05K 9/0064 (2013.01) [H01J 37/20 (2013.01); H01J 37/32477 (2013.01); H01J 37/32495 (2013.01); H01L 21/68707 (2013.01); H01L 21/68757 (2013.01); H05F 1/02 (2013.01)] 19 Claims
OG exemplary drawing
 
1. An end effector for a robot arm, comprising:
an end effector body;
three or more contact pads on the end effector body; and
a coating deposited on a surface of the end effector body, the coating comprising an electrically-dissipative material, wherein the electrically-dissipative material is to provide a dissipative path from the coating to ground, wherein the coating has a thickness ranging from about 20 nm to about 500 nm.