CPC H05K 9/0064 (2013.01) [H01J 37/20 (2013.01); H01J 37/32477 (2013.01); H01J 37/32495 (2013.01); H01L 21/68707 (2013.01); H01L 21/68757 (2013.01); H05F 1/02 (2013.01)] | 19 Claims |
1. An end effector for a robot arm, comprising:
an end effector body;
three or more contact pads on the end effector body; and
a coating deposited on a surface of the end effector body, the coating comprising an electrically-dissipative material, wherein the electrically-dissipative material is to provide a dissipative path from the coating to ground, wherein the coating has a thickness ranging from about 20 nm to about 500 nm.
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