US 12,003,235 B2
Tactile sensor formed on polyimide thin film having high total light transmittance, and switching device using same
Jun Okabe, Tokyo (JP); Tadahiro Sunaga, Yamato (JP); Shizuo Tokito, Yonezawa (JP); and Tomohito Sekine, Yamagata (JP)
Assigned to MITSUI CHEMICALS, INC., Tokyo (JP)
Appl. No. 17/613,647
Filed by MITSUI CHEMICALS, INC., Tokyo (JP)
PCT Filed Jun. 15, 2020, PCT No. PCT/JP2020/023394
§ 371(c)(1), (2) Date Nov. 23, 2021,
PCT Pub. No. WO2020/255920, PCT Pub. Date Dec. 24, 2020.
Claims priority of application No. 2019-113906 (JP), filed on Jun. 19, 2019.
Prior Publication US 2022/0239296 A1, Jul. 28, 2022
Int. Cl. H01L 41/113 (2006.01); C08G 73/10 (2006.01); H03K 17/96 (2006.01); H10N 30/30 (2023.01); H10N 30/857 (2023.01)
CPC H03K 17/964 (2013.01) [C08G 73/1082 (2013.01); H10N 30/302 (2023.02); H10N 30/857 (2023.02)] 14 Claims
OG exemplary drawing
 
1. A tactile sensor, comprising:
a first electrode printed on a surface of a polyimide thin film having a constituent unit represented by a general formula (1) below, the polyimide thin film having a glass transition temperature of 250° C. or higher and 310° C. or lower, a tensile strength of 250 MPa or less, an elongation rate of 30% or less, a total light transmittance of 80% or more, and a polar component of surface free energy in the range of 1.5 to 10 mJ/m2:

OG Complex Work Unit Chemistry
wherein X is at least one member selected from the group consisting of the following alicyclic groups:

OG Complex Work Unit Chemistry
and
wherein Y is at least one member selected from the group consisting of the following aromatic groups:

OG Complex Work Unit Chemistry
a ferroelectric layer printed so as to cover the first electrode; and
a second electrode printed so as to be superposed with the first electrode with the ferroelectric layer therebetween.