US 12,003,195 B2
MEMS actuation system
Guiqin Wang, Arcadia, CA (US); Matthew Ng, Rosemead, CA (US); and Xiaolei Liu, South Pasadena, CA (US)
Assigned to MEMS DRIVE (NANJING) CO., LTD, Nanjing (CN)
Filed by MEMS Drive, Inc., Pasadena, CA (US)
Filed on Sep. 26, 2019, as Appl. No. 16/584,567.
Claims priority of provisional application 62/736,940, filed on Sep. 26, 2018.
Prior Publication US 2020/0099318 A1, Mar. 26, 2020
Int. Cl. H02N 2/02 (2006.01); G02B 5/20 (2006.01); G02B 7/09 (2021.01); G02B 27/64 (2006.01); G03B 5/02 (2021.01); G03B 5/04 (2021.01); G03B 11/00 (2021.01); G03B 13/36 (2021.01); H02K 41/035 (2006.01); H02N 1/00 (2006.01)
CPC H02N 2/028 (2013.01) [G02B 5/208 (2013.01); G02B 7/09 (2013.01); G02B 27/646 (2013.01); G03B 5/02 (2013.01); G03B 5/04 (2013.01); G03B 11/00 (2013.01); G03B 13/36 (2013.01); H02K 41/0356 (2013.01); H02N 1/008 (2013.01); G03B 2205/0015 (2013.01); G03B 2205/0061 (2013.01); H02K 2201/18 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A multi-axis micro-electrical-mechanical system (MEMS) assembly comprising:
a MEMS actuator configured to provide linear three-axis movement, the MEMS actuator including:
an in-plane MEMS actuator, and
an out-of-plane MEMS actuator; and
an optoelectronic device coupled to the MEMS actuator;
wherein the in-plane MEMS actuator includes hybrid actuator including:
an in-plane MEMS actuator portion including at least two motion stages including a respective polarized magnetic material/magnet associated with each motion stage and having differing polarizations:
an in-plane electromagnetic actuator portion including a magnetic plate assembly to which at least two magnetic assemblies are attached, including a first magnetic assembly and a second magnetic assembly positioned orthogonal to the first magnetic assembly, the magnetic assemblies configured to interact with a respective polarized magnetic material/magnet.