US 12,002,752 B2
Method for manufacturing a fuse component
Kai-Po Shang, Taoyuan (TW); and Jui-Hsiu Jao, Taoyuan (TW)
Assigned to NANYA TECHNOLOGY CORPORATION, New Taipei (TW)
Filed by NANYA TECHNOLOGY CORPORATION, New Taipei (TW)
Filed on Dec. 3, 2021, as Appl. No. 17/541,745.
Prior Publication US 2023/0178481 A1, Jun. 8, 2023
Int. Cl. H01L 23/525 (2006.01); H01L 29/40 (2006.01); H01L 29/423 (2006.01); H01L 23/535 (2006.01)
CPC H01L 23/5256 (2013.01) [H01L 23/5252 (2013.01); H01L 29/401 (2013.01); H01L 29/4236 (2013.01); H01L 23/535 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A method of manufacturing a fuse component, comprising:
providing an active region;
forming a first recess region and a second recess region in the active region;
disposing a fuse dielectric material in the first recess region and the second recess region; and
filling the first recess region and the second recess region with a gate metal material;
wherein the first recess region and the second recess region are formed between a first isolation structure and a second isolation structure.