CPC H01L 21/68742 (2013.01) [C23C 16/4401 (2013.01); H01J 37/32715 (2013.01); H01L 21/67017 (2013.01); H01L 21/67103 (2013.01); H01L 21/67109 (2013.01); H01L 21/6831 (2013.01); H01L 21/6833 (2013.01); H01L 21/68757 (2013.01); H01L 21/68785 (2013.01); H01J 37/32449 (2013.01); H01L 21/67069 (2013.01)] | 20 Claims |
1. A lift pin assembly comprising:
a lift pin guide;
a purge cylinder disposed adjacent the lift pin guide, the lift pin guide and the purge cylinder having a passage formed therethrough that is configured to receive a lift pin suitable for lifting a substrate, wherein the purge cylinder comprises:
a plurality of nozzles configured to direct a flow of gas radially inward into a portion of the passage disposed in the purge cylinder that receives the lift pin, each nozzle included in the plurality of nozzles having an outer diameter of about 20 mil to about 80 mil; and
a bushing, wherein the lift pin guide is disposed between the purge cylinder and the bushing.
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