US 12,002,697 B2
Method for detecting the splitting of a substrate weakened by implanting atomic species
François Rieutord, Saint Egreve (FR); Frédéric Mazen, Saint Egreve (FR); Didier Landru, Le Champ-près-Froges (FR); Oleg Kononchuk, Theys (FR); and Nadia Ben Mohamed, Echirolles (FR)
Assigned to Soitec, Bernin (FR)
Appl. No. 17/042,755
Filed by Soitec, Bernin (FR); and Commissariat A L'Energie Atomique et aux Énergies Alternatives, Paris (FR)
PCT Filed Mar. 22, 2019, PCT No. PCT/FR2019/050659
§ 371(c)(1), (2) Date Sep. 28, 2020,
PCT Pub. No. WO2019/186037, PCT Pub. Date Oct. 3, 2019.
Claims priority of application No. 1852683 (FR), filed on Mar. 28, 2018.
Prior Publication US 2021/0028036 A1, Jan. 28, 2021
Int. Cl. H01L 21/67 (2006.01); G01N 29/14 (2006.01); G01N 29/46 (2006.01); H01L 21/66 (2006.01)
CPC H01L 21/67288 (2013.01) [G01N 29/14 (2013.01); G01N 29/46 (2013.01); H01L 21/67109 (2013.01); H01L 22/12 (2013.01); G01N 2291/2697 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for monitoring a heat treatment applied to a batch of substrates in a heating chamber, each substrate comprising a weakened zone formed by implanting atomic species for splitting the substrate along the weakened zone, the method comprising:
recording sound in the interior or in the vicinity of the heating chamber;
detecting, in the recording, an acoustic signature emitted by each substrate during the splitting thereof along the weakened zone;
determining, based on the detected acoustic signature, that a splitting of each substrate along the weakened zone has occurred;
determining a number of substrates having split;
comparing the number of substrates having split to the number of substrates in the batch; and
stopping the heat treatment once each substrate has been detected to have split.