US 12,002,694 B2
Load port module
Radik Sunugatov, Santa Clara, CA (US); and Robert Carlson, Milpitas, CA (US)
Assigned to Brooks Automation US, LLC, Chelmsford, MA (US)
Filed by Brooks Automation US, LLC, Chelmsford, MA (US)
Filed on Mar. 21, 2023, as Appl. No. 18/187,345.
Application 18/187,345 is a continuation of application No. 17/341,638, filed on Jun. 8, 2021, granted, now 11,610,793.
Application 17/341,638 is a continuation of application No. 16/692,443, filed on Nov. 22, 2019, granted, now 11,031,265, issued on Jun. 8, 2021.
Claims priority of provisional application 62/772,481, filed on Nov. 28, 2018.
Prior Publication US 2023/0411187 A1, Dec. 21, 2023
Int. Cl. H01L 21/67 (2006.01); B65G 49/06 (2006.01)
CPC H01L 21/67201 (2013.01) [B65G 49/068 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A substrate transport container holding apparatus comprising:
a frame disposed to hold at least one substrate transport container in a predetermined communication with a controlled environment region;
a container support connected to the frame for supporting the at least one substrate transport container on the frame in a predetermined orientation so that the at least one substrate transport container is held in predetermined communication with the controlled environment; and
selectably variable container support purge ports each with a variable purge port nozzle, variable between more than one selectable predetermined purge port nozzle characteristics, disposed on the container support, each of the more than one purge port nozzle characteristics being configured so that the purge port nozzle with each selected predetermined purge port nozzle characteristic complements and couples to at least one purge port of the at least one substrate transport container.