US 12,002,693 B2
EFEM
Toshihiro Kawai, Tokyo (JP); and Gengoro Ogura, Tokyo (JP)
Assigned to SINFONIA TECHNOLOGY CO., LTD., Tokyo (JP)
Filed by Sinfonia Technology Co., Ltd., Tokyo (JP)
Filed on Oct. 3, 2022, as Appl. No. 17/959,247.
Application 17/959,247 is a continuation of application No. 16/980,727, granted, now 11,495,481, previously published as PCT/JP2019/010349, filed on Mar. 13, 2019.
Claims priority of application No. 2018-048467 (JP), filed on Mar. 15, 2018.
Prior Publication US 2023/0077810 A1, Mar. 16, 2023
Int. Cl. H01L 21/67 (2006.01); B01D 46/00 (2022.01); B01D 46/10 (2006.01)
CPC H01L 21/67201 (2013.01) [B01D 46/0041 (2013.01); H01L 21/67196 (2013.01); B01D 46/10 (2013.01); B01D 2273/30 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A transfer system comprising:
a mounting table configured to mount a container in which a transfer target is accommodated;
a housing having an opening in communication with an outside of the housing, and configured to define, in the housing, a transfer chamber for transferring the transfer target;
a base configured to close the opening;
a gas supplier configured to supply a predetermined gas into the transfer chamber;
a gas discharger configured to discharge a gas in the transfer chamber;
a pressure gauge configured to measure a pressure in the transfer chamber; and
a controller electrically connected to the gas discharger and the pressure gauge,
wherein the base includes:
a window configured to be capable of moving the transfer target from or to the outside of the housing;
an opening/closing mechanism configured to be capable of opening and closing the window; and
an accommodation chamber located below the mounting table, and configured to be in communication with the transfer chamber and accommodate a part of the opening/closing mechanism,
wherein the gas discharger is directly connected to the accommodation chamber, and is configured to discharge gas from the accommodation chamber to thereby discharge the gas in the transfer chamber via the accommodation chamber, and
wherein the controller is configured to control the gas discharger to adjust a discharge flow rate for the gas in the transfer chamber based on the pressure detected by the pressure gauge such that the pressure in the transfer chamber is higher than an external pressure.