US 12,002,667 B2
Sputtering apparatus and method of controlling sputtering apparatus
Masato Shinada, Tokyo (JP); Tetsuya Miyashita, Yamanashi (JP); and Einstein Noel Abarra, Tokyo (JP)
Assigned to Tokyo Electron Limited, Tokyo (JP)
Filed by TOKYO ELECTRON LIMITED, Tokyo (JP)
Filed on Dec. 20, 2021, as Appl. No. 17/556,025.
Claims priority of application No. 2020-215671 (JP), filed on Dec. 24, 2020.
Prior Publication US 2022/0208534 A1, Jun. 30, 2022
Int. Cl. H01J 37/34 (2006.01); C23C 14/34 (2006.01); C23C 14/50 (2006.01); C23C 14/54 (2006.01); H01J 37/32 (2006.01)
CPC H01J 37/3441 (2013.01) [C23C 14/34 (2013.01); C23C 14/50 (2013.01); C23C 14/54 (2013.01); H01J 37/32715 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A sputtering apparatus comprising:
a processing chamber including:
a chamber main body with an open upper portion; and
a cover provided to close the open upper portion of the chamber main body;
a target from which sputtered particles are emitted;
a substrate support configured to support a substrate;
a substrate moving mechanism configured to move the substrate in horizontal direction;
a shielding member disposed between the target and the substrate support and having an opening through which the sputtered particles pass,
wherein the shielding member includes a first shielding member, a second shielding member, and a third shielding member, the first shielding member arranged over the second shielding member, the second shielding member arranged over the third shielding member, and the third shielding member being apart from the substrate, and
wherein an edge portion of the third shielding member is fixed to a side wall of the chamber main body;
a target holder fixed on the cover, wherein the target holder holds the target on a front side of the target holder;
a magnet disposed on a back side of the target holder and configured to reciprocate;
a first driver configured to drive the first shielding member in horizontal direction; and
a second driver configured to rotate the second shielding member, the second shielding member having a plate shape and rotating horizontally about an axis which is perpendicular to a top surface of the second shielding member.