CPC H01J 37/32972 (2013.01) [G01J 3/443 (2013.01); H01J 37/32733 (2013.01)] | 10 Claims |
1. A measuring device for measuring a state in a processing chamber of a vacuum processing apparatus, the measuring device being detachably attached to the processing chamber, the measuring device comprising:
a measuring mechanism configured to measure a state in the processing chamber;
a first case in which the measuring mechanism is accommodated;
a second case communicating with the first case through an openable shutter member, having an opening for connecting with a gate of the processing chamber, and being located between the first case and the processing chamber; and
a decompressing mechanism configured to reduce pressure in the first case and pressure in the second case.
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