US 12,002,658 B2
Process cooling-water isolation
Sreeram Sonti, Tigard, OR (US)
Assigned to LAM RESEARCH CORPORATION, Fremont, CA (US)
Appl. No. 17/598,783
Filed by Lam Research Corporation, Fremont, CA (US)
PCT Filed Mar. 26, 2020, PCT No. PCT/US2020/025048
§ 371(c)(1), (2) Date Sep. 27, 2021,
PCT Pub. No. WO2020/198521, PCT Pub. Date Oct. 1, 2020.
Claims priority of provisional application 62/825,589, filed on Mar. 28, 2019.
Prior Publication US 2022/0165549 A1, May 26, 2022
Int. Cl. H01J 37/32 (2006.01); G01M 3/16 (2006.01); G01M 3/18 (2006.01); G08B 21/20 (2006.01)
CPC H01J 37/32522 (2013.01) [G01M 3/165 (2013.01); G01M 3/186 (2013.01); G08B 21/20 (2013.01); H01J 37/32724 (2013.01); H01J 37/32807 (2013.01); H01J 37/3288 (2013.01); H01J 37/32357 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A process cooling-water isolation system used in a process tool, the system comprising:
an isolation valve having an inlet port and an outlet port, the inlet port is configured to be coupled to a water supply, and the outlet port is configured to be coupled to an inlet of one or more components in a process-module water-cooling circuit;
an open device coupled to the isolation valve to open the isolation valve to allow coding water to flow to the one or more components in the process-module water-coding circuit;
a dose device coupled to the isolation valve to dose the isolation valve to prevent coding water from flowing to the one or more components in the process-module water-coding circuit;
at least one water-leak sensor coupled to the dose device, the at least one water-leak sensor to detect a water leak within the process tool; and
a check valve having an inlet port and an outlet port, the inlet port configured to be coupled to an outlet of one or more components in the process-module water-coding circuit, the outlet port configured to be coupled to a water-return reservoir, the check valve to prevent water from back-flowing from the water-return reservoir into the one or more components in the process-module water-cooling circuit.