CPC H01J 37/32522 (2013.01) [G01M 3/165 (2013.01); G01M 3/186 (2013.01); G08B 21/20 (2013.01); H01J 37/32724 (2013.01); H01J 37/32807 (2013.01); H01J 37/3288 (2013.01); H01J 37/32357 (2013.01)] | 19 Claims |
1. A process cooling-water isolation system used in a process tool, the system comprising:
an isolation valve having an inlet port and an outlet port, the inlet port is configured to be coupled to a water supply, and the outlet port is configured to be coupled to an inlet of one or more components in a process-module water-cooling circuit;
an open device coupled to the isolation valve to open the isolation valve to allow coding water to flow to the one or more components in the process-module water-coding circuit;
a dose device coupled to the isolation valve to dose the isolation valve to prevent coding water from flowing to the one or more components in the process-module water-coding circuit;
at least one water-leak sensor coupled to the dose device, the at least one water-leak sensor to detect a water leak within the process tool; and
a check valve having an inlet port and an outlet port, the inlet port configured to be coupled to an outlet of one or more components in the process-module water-coding circuit, the outlet port configured to be coupled to a water-return reservoir, the check valve to prevent water from back-flowing from the water-return reservoir into the one or more components in the process-module water-cooling circuit.
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