CPC H01J 37/32495 (2013.01) [C23C 16/045 (2013.01); C23C 16/06 (2013.01); C23C 16/403 (2013.01); C23C 16/405 (2013.01); C23C 16/4404 (2013.01); C23C 16/45527 (2013.01); C23C 16/45529 (2013.01); C23C 16/45531 (2013.01); C23C 16/45544 (2013.01); C23C 16/45565 (2013.01); C23C 16/50 (2013.01); H01J 37/3244 (2013.01); H01J 2237/3321 (2013.01); H01J 2237/334 (2013.01); H01J 2237/335 (2013.01); H01L 21/67028 (2013.01); H01L 21/67069 (2013.01)] | 10 Claims |
1. An article comprising:
a body; and
a plasma resistant coating on a surface of at least a portion of the body, wherein the plasma resistant coating comprises:
a stress relief layer having a thickness of about 10 nm to about 1.5 μm; and
a stack of alternating layers of a rare earth metal-containing oxide and a second oxide, the stack of alternating layers comprising:
a plurality of layers of the rare earth metal-containing oxide each having a thickness of about 1 angstrom to about 100 angstroms and having a polycrystalline or amorphous structure; and
a plurality of layers of the second oxide each having a thickness of about 0.5 angstroms to about 4 angstroms,
wherein the rare earth metal-containing oxide naturally occurs in a crystalline structure, wherein the plurality of layers of the second oxide cause the plurality of layers of the rare earth metal-containing oxide to have the polycrystalline or amorphous structure rather than the crystalline structure, and wherein a thickness ratio of the plurality of layers of the rare earth metal-containing oxide to the plurality of layers of the second oxide is 2:1 to 25:1.
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