CPC H01J 37/32449 (2013.01) [H01J 37/145 (2013.01); H01J 37/244 (2013.01); H01J 37/28 (2013.01); H01J 37/304 (2013.01); H01J 2237/006 (2013.01); H01J 2237/2065 (2013.01)] | 20 Claims |
1. A method for operating a gas feed device for a particle beam apparatus, the method comprising:
predetermining a flow rate of at least one precursor through an outlet of a precursor reservoir, wherein the precursor reservoir contains the precursor to be fed onto an object;
loading a temperature of the precursor reservoir from a database into a control unit, the temperature being associated with the predetermined flow rate;
setting a temperature of the precursor reservoir to the temperature loaded from the database using a temperature setting unit; and
determining at least one functional parameter of the precursor reservoir depending on the flow rate and the temperature, loaded from the database, using the control unit and informing a user of the gas feed device about the determined functional parameter.
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