US 12,002,656 B2
Operating a gas feed device for a particle beam apparatus
Andreas Schmaunz, Oberkochen (DE)
Assigned to Carl Zeiss Microscopy GmbH, Jena (DE)
Filed by Carl Zeiss Microscopy GmbH, Jena (DE)
Filed on Aug. 7, 2023, as Appl. No. 18/230,722.
Application 18/230,722 is a division of application No. 16/720,037, filed on Dec. 19, 2019, granted, now 11,764,036.
Claims priority of application No. 102018222522.2 (DE), filed on Dec. 20, 2018.
Prior Publication US 2023/0420224 A1, Dec. 28, 2023
Int. Cl. H01J 37/32 (2006.01); H01J 37/145 (2006.01); H01J 37/244 (2006.01); H01J 37/28 (2006.01); H01J 37/304 (2006.01)
CPC H01J 37/32449 (2013.01) [H01J 37/145 (2013.01); H01J 37/244 (2013.01); H01J 37/28 (2013.01); H01J 37/304 (2013.01); H01J 2237/006 (2013.01); H01J 2237/2065 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for operating a gas feed device for a particle beam apparatus, the method comprising:
predetermining a flow rate of at least one precursor through an outlet of a precursor reservoir, wherein the precursor reservoir contains the precursor to be fed onto an object;
loading a temperature of the precursor reservoir from a database into a control unit, the temperature being associated with the predetermined flow rate;
setting a temperature of the precursor reservoir to the temperature loaded from the database using a temperature setting unit; and
determining at least one functional parameter of the precursor reservoir depending on the flow rate and the temperature, loaded from the database, using the control unit and informing a user of the gas feed device about the determined functional parameter.