US 12,002,649 B2
Spinning disk with electrostatic clamped platens for ion implantation
Robert Mitchell, Winchester, MA (US); Frank Sinclair, Hartland, ME (US); Joseph C. Olson, Beverly, MA (US); William T. Weaver, Austin, TX (US); and Nick Parisi, Gloucester, MA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Dec. 10, 2021, as Appl. No. 17/547,623.
Prior Publication US 2023/0187166 A1, Jun. 15, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. H01J 37/20 (2006.01); C23C 14/48 (2006.01); C23C 14/50 (2006.01); H01J 37/317 (2006.01); H01L 21/683 (2006.01)
CPC H01J 37/20 (2013.01) [C23C 14/48 (2013.01); C23C 14/505 (2013.01); H01J 37/3171 (2013.01); H01L 21/6833 (2013.01); H01J 2237/20214 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A spinning disk to process a plurality of workpieces, comprising:
a central hub adapted to rotate about a central axis;
a plurality of spokes extending radially outward from the central hub, wherein each of the plurality of spokes is adapted to rotate about a respective axis extending radially from the central hub;
a platen disposed on a distal end of each of the plurality of spokes, each platen comprising a plurality of electrodes and configured to electrostatically clamp a respective workpiece; and
a plurality of rotary motors disposed in the central hub, each in communication with a respective one of the plurality of spokes and configured to rotate the respective one of the plurality of spokes.