US 12,001,197 B2
Eco-efficiency (sustainability) dashboard for semiconductor manufacturing
Ala Moradian, San Jose, CA (US); Elizabeth Neville, Sunnyvale, CA (US); Umesh Madhav Kelkar, Cupertino, CA (US); Mark R. Denome, Sunnyvale, CA (US); Prashanth Kothnur, San Jose, CA (US); Karthik Ramanathan, Karnataka (IN); Kartik Shah, Saratoga, CA (US); Orlando Trejo, Santa Clara, CA (US); and Sergey Meirovich, Austin, TX (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Apr. 14, 2021, as Appl. No. 17/230,897.
Prior Publication US 2022/0334569 A1, Oct. 20, 2022
Int. Cl. H01L 21/67 (2006.01); G05B 13/02 (2006.01); G05B 19/418 (2006.01); G05B 19/41 (2006.01)
CPC G05B 19/41885 (2013.01) [G05B 13/027 (2013.01); G05B 2219/32335 (2013.01); G05B 2219/32359 (2013.01); G05B 2219/45031 (2013.01); H01L 21/67276 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A method, comprising:
receiving, by a processing device, a first selection of a first fabrication process associated with a first manufacturing equipment of a first manufacturing environment;
inputting, by the processing device, the first selection into a digital replica of the first manufacturing equipment, wherein the digital replica outputs estimated physical conditions of an environment within the first manufacturing equipment during performance of manufacturing operations of the first fabrication process;
determining, by the processing device, environmental resource usage data indicative of a first environmental resource consumption of the first fabrication process run on the first manufacturing equipment based on the estimated physical conditions of the environment within the first manufacturing equipment during the first fabrication process;
determining, by the processing device and based on the environmental resource usage data, an eco-optimized process parameter window comprising values for one or more process parameters for the fabrication process that will reduce the first environmental resource consumption of the first fabrication process when run using the first manufacturing equipment, wherein the values for the one or more process parameters of the eco-optimized process parameter window are associated with an improved reduction of the environmental resource consumption with respect to values for the one or more process parameters that are outside of the eco-optimized process parameter window; and
applying, by the processing device, the values for the one or more process parameters of the eco-optimized process parameter window to the first fabrication process.