US 12,001,194 B2
Substrate processing apparatus, method of controlling the same, and storage medium having stored therein program thereof
Seung Yeon Kim, Cheonan-si (KR)
Assigned to SEMES CO., LTD., Cheonan-si (KR)
Filed by SEMES CO., LTD., Cheonan-si (KR)
Filed on Oct. 17, 2019, as Appl. No. 16/656,572.
Claims priority of application No. 10-2018-0124401 (KR), filed on Oct. 18, 2018.
Prior Publication US 2020/0125075 A1, Apr. 23, 2020
Int. Cl. G05B 19/41 (2006.01); G05B 19/418 (2006.01); H01J 37/32 (2006.01); H01L 21/67 (2006.01)
CPC G05B 19/4184 (2013.01) [H01J 37/3288 (2013.01); G05B 2219/45031 (2013.01); H01J 37/3211 (2013.01); H01J 37/32449 (2013.01); H01J 37/32724 (2013.01); H01J 37/32816 (2013.01); H01J 2237/186 (2013.01); H01J 2237/2485 (2013.01); H01J 2237/332 (2013.01); H01J 2237/3341 (2013.01); H01L 21/67017 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A substrate processing apparatus including one or more operation elements, the substrate processing apparatus comprising:
a processing unit configured to control operation of the substrate processing apparatus, wherein the processing unit is in an operating status including a first operating state of the processing unit being restarted for updating an operating system (OS) of the process unit and a second operating state of the processing unit being terminated due to power outage; and
a controller configured to:
receive, when the operation of the processing unit is in one of the first operating state and the second operating state, maintenance ranges of operation states of at least one operation element selected from the one or more operation elements from a source outside of the substrate processing apparatus;
determine whether the processing unit is in the first operating state or the second operating state;
operate, during a time when the processing unit is in the first operating, the one or more operation elements of the substrate processing apparatus to maintain the operation states of at least one operation element selected from the one or more operation elements within the maintenance ranges of the operation states; and
operate, during a time when the processing unit is in the second operating state, the one or more operation elements of the substrate processing apparatus to maintain the operation states of all of the one or more operation elements.