US 12,001,012 B2
Piezoelectric based MEMS device with time sharing actuation and sensing circuitry
Davide Terzi, Bergamo (IT); Gianluca Mendicino, Legnano (IT); and Dadi Sharon, Givat Ada (IT)
Assigned to STMicroelectronics S.r.l., Agrate Brianza (IT); and STMicroelectronics Ltd, Netanya (IL)
Filed by STMicroelectronics S.r.l., Agrate Brianza (IT); and STMicroelectronics Ltd, Netanya (IL)
Filed on Apr. 23, 2021, as Appl. No. 17/238,596.
Prior Publication US 2022/0342205 A1, Oct. 27, 2022
Int. Cl. G02B 26/10 (2006.01); B81B 3/00 (2006.01); G02B 26/08 (2006.01); G09G 3/34 (2006.01); H02N 2/10 (2006.01); H02N 2/14 (2006.01); H03H 9/15 (2006.01); H10N 30/20 (2023.01); H10N 30/853 (2023.01)
CPC G02B 26/101 (2013.01) [B81B 3/0021 (2013.01); G02B 26/0858 (2013.01); G09G 3/346 (2013.01); H02N 2/103 (2013.01); H02N 2/145 (2013.01); H03H 9/15 (2013.01); H10N 30/204 (2023.02); B81B 2201/032 (2013.01); H10N 30/8554 (2023.02)] 18 Claims
OG exemplary drawing
 
1. A microelectromechanical (MEMS) device, comprising:
a rotor;
a first plurality of piezoelectric actuators mechanically coupled to the rotor, the first plurality of piezoelectric actuators being electrically coupled between a first signal pad and a common mode voltage pad;
a second plurality of piezoelectric actuators mechanically coupled to the rotor, the second plurality of piezoelectric actuators being electrically coupled between a second signal pad and the common mode voltage pad; and
a control circuitry, comprising:
mirror drive circuitry configured to alternatingly generate drive pulses for the first plurality of piezoelectric actuators on the first signal pad and the second plurality of piezoelectric actuators on the second signal pad;
sense circuitry configured to alternatingly receive sense signals from the second plurality of piezoelectric actuators and the first plurality of piezoelectric actuators;
a first multiplexing circuit configured to couple the drive pulses generated for the second plurality of piezoelectric actuators to the second plurality of piezoelectric actuators simultaneously with a second multiplexing circuit coupling the sense signals received from the first plurality of piezoelectric actuators to the sense circuitry; and
wherein the second multiplexing circuit configured to couple the drive pulses generated for the first plurality of piezoelectric actuators to the first plurality of piezoelectric actuators simultaneously with the first multiplexing circuit coupling the sense signals received from the second plurality of piezoelectric actuators to the sense circuitry.