US 12,001,010 B2
Synchronization of microelectromechanical system (MEMS) mirrors
Norbert Druml, Graz (AT); Philipp Greiner, Graz (AT); Boris Kirillov, Judendorf-Straßenge (AT); Ievgeniia Maksymova, Graz (AT); Maksym Sladkov, Graz (AT); and Hendrikus Van Lierop, Bj Weert (NL)
Assigned to Infineon Technologies AG, Neubiberg (DE)
Filed by Infineon Technologies AG, Neubiberg (DE)
Filed on Mar. 9, 2022, as Appl. No. 17/690,149.
Application 17/690,149 is a continuation of application No. 16/376,544, filed on Apr. 5, 2019, granted, now 11,307,403.
Prior Publication US 2022/0197015 A1, Jun. 23, 2022
Int. Cl. G02B 26/08 (2006.01); G01S 7/481 (2006.01); G02B 26/10 (2006.01)
CPC G02B 26/0841 (2013.01) [G01S 7/4817 (2013.01); G02B 26/101 (2013.01)] 12 Claims
OG exemplary drawing
 
1. An oscillator system, comprising:
an oscillator structure configured to oscillate about a first axis according to a first oscillation and oscillate about a second axis according to a second oscillation;
a first driver configured to drive the first oscillation of the oscillator structure, receive a first measurement signal representative of an entire angular trajectory traversed by the oscillator structure throughout its first oscillation, detect first crossing events of the oscillator structure at which a value of the first measurement signal is equal to a first predefined value that corresponds to a predefined displacement angle of the oscillator structure with respect to the first axis, and generate a first position signal that indicates each of the detected first crossing events with a signal transition;
a second driver configured to drive the second oscillation of the oscillator structure, receive a second measurement signal representative of an entire angular trajectory traversed by the oscillator structure throughout its oscillation, detect second crossing events of the oscillator structure at which a value of the second measurement signal is equal to a second predefined value that corresponds to the predefined displacement angle of the oscillator structure with respect to the second axis, and generate a second position signal that indicates each of the detected second crossing events with a signal transition; and
a synchronization controller configured to receive the first position signal and the second position signal, and synchronize at least one of a phase or a frequency of the first oscillation of the oscillator structure with at least one of a phase or a frequency of the second oscillation of the oscillator structure, respectively, based on the first position signal and the second position signal.