US 12,000,910 B2
Sensor including protruding surface
Hiromichi Umehara, Tokyo (JP); Keita Kawamori, Tokyo (JP); Kenzo Makino, Tokyo (JP); and Masachika Hashino, Tokyo (JP)
Assigned to TDK CORPORATION, Tokyo (JP)
Filed by TDK CORPORATION, Tokyo (JP)
Filed on Sep. 15, 2022, as Appl. No. 17/945,514.
Claims priority of provisional application 63/246,437, filed on Sep. 21, 2021.
Prior Publication US 2023/0086730 A1, Mar. 23, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. G01R 33/09 (2006.01); G01R 33/00 (2006.01)
CPC G01R 33/093 (2013.01) [G01R 33/0047 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A sensor configured to detect a predetermined physical quantity, comprising:
a substrate including a top surface;
a support member disposed on the substrate; and
a sensor element configured to change in a physical property depending on the predetermined physical quantity, wherein
the support member includes a protruding surface protruding in a direction away from the top surface of the substrate and including at least one inclined surface,
the sensor element includes a functional layer constituting at least a part of the sensor element,
the functional layer is disposed on the at least one inclined surface, and
a dimension of the protruding surface in a direction perpendicular to the top surface of the substrate is in a range from 1.4 μm or more to 3.0 μm or less.