US 12,000,882 B2
Sampling measurement method, system, computer device and storage medium
Xianfeng Ming, Hefei (CN); and Jinguang Li, Hefei (CN)
Assigned to CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei (CN)
Filed by CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei (CN)
Filed on Oct. 21, 2021, as Appl. No. 17/506,767.
Application 17/506,767 is a continuation of application No. PCT/CN2021/109427, filed on Jul. 30, 2021.
Claims priority of application No. 202110260844.X (CN), filed on Mar. 10, 2021.
Prior Publication US 2022/0291275 A1, Sep. 15, 2022
Int. Cl. G01R 31/26 (2020.01)
CPC G01R 31/2601 (2013.01) 15 Claims
OG exemplary drawing
 
1. A sampling measurement method, comprising:
acquiring a preset measurement ratio of each process element in a process station;
acquiring an actual measurement ratio of a process element associated with a lot of products to be measured that arrive at a measurement station in the process station;
in a case where the actual measurement ratio of the process element associated with the lot of products to be measured is less than a corresponding preset measurement ratio, controlling a measurement machine at the measurement station to measure the lot of products to be measured;
acquiring an idle ratio of the measurement machine at the measurement station; and
in a case where the idle ratio of the measurement machine at the measurement station is greater than 0, determining a process element associated with the lot of products whose previous measurement time is furthest from a current moment, and increasing the preset measurement ratio of the process element associated with the lot of products whose previous measurement time is furthest from the current moment by a first preset value.