US 12,000,865 B2
Multi-beam vertical probes with independent arms formed of a high conductivity metal for enhancing current carrying capacity and methods for making such probes
Uri Frodis, Los Angeles, CA (US)
Assigned to Microfabrica Inc., Van Nuys (CA)
Filed by Microfabrica Inc., Van Nuys, CA (US)
Filed on Sep. 28, 2021, as Appl. No. 17/488,176.
Application 17/488,176 is a continuation in part of application No. 17/320,173, filed on May 13, 2021, granted, now 11,828,775.
Application 17/320,173 is a continuation in part of application No. 17/240,962, filed on Apr. 26, 2021, granted, now 11,821,918.
Application 17/240,962 is a continuation in part of application No. 16/791,288, filed on Feb. 14, 2020, abandoned.
Claims priority of provisional application 63/024,456, filed on May 13, 2020.
Claims priority of provisional application 63/015,450, filed on Apr. 24, 2020.
Claims priority of provisional application 62/805,589, filed on Feb. 14, 2019.
Prior Publication US 2024/0103040 A1, Mar. 28, 2024
Int. Cl. G01R 1/067 (2006.01); G01R 1/073 (2006.01); G01R 3/00 (2006.01)
CPC G01R 1/06761 (2013.01) [G01R 1/06744 (2013.01); G01R 1/07314 (2013.01); G01R 3/00 (2013.01)] 21 Claims
OG exemplary drawing
 
1. A vertical probe, comprising:
(a) a first end portion comprising a contact region;
(b) a second end portion, different from the first end portion; and
(c) a central portion extending longitudinally and connecting the first and second end portions, wherein the central portion comprises at least three compliant arms separated from one another by at least one gap wherein the arms bend under load and run longitudinally, wherein a cross-section taken perpendicular to a local longitudinal direction in the central portion encounters each of the at least three compliant arms,
wherein the at least three compliant arms comprise at least first and second outer arms that bend elastically and at least one intermediate arm located at a position that is at least partially between the first and second outer arms, wherein each of the first and second outer arms comprise a first material having a first yield strength while the intermediate arm comprises a second material having a second yield strength which is lower than the first yield strength, and
wherein the first material having the first yield strength comprises a material selected from a group consisting of: (1) nickel, (2) nickel-cobalt, (3) nickel-phosphor, (4) palladium, (5) beryllium-copper, (6) tungsten, (7) titanium, (8) nickel-tungsten, (9) palladium-rhenium, (10) an alloy of nickel, and (11) an alloy of palladium.