	US 12,000,859 B2
	Resonant microelectromechanical sensor with improved operation
Marc Sansa Perna, Grenoble (FR); Théo Miani, Grenoble (FR); and Thierry Verdot, Grenoble (FR)
Assigned to COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES, Paris (FR)
Filed by COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES, Paris (FR)
Filed on Sep. 6, 2022, as Appl. No. 17/929,872.
Claims priority of application No. 21 09455 (FR), filed on Sep. 9, 2021.
Prior Publication US 2023/0072687 A1, Mar. 9, 2023
Int. Cl. G01P 15/097 (2006.01); G01P 15/08 (2006.01); H03H 9/02 (2006.01)

CPC G01P 15/097 (2013.01) [H03H 9/02362 (2013.01); G01P 2015/0814 (2013.01); G01P 2015/0851 (2013.01); G01P 2015/0882 (2013.01)]

12 Claims

1. A resonant sensor, comprising:

a support,

a proof body suspended from the support and having a resonant frequency ωa, means for measuring a force including at least one resonator of resonant frequency ω_rn, said force being applied by the proof body, and

a mechanical decoupling structure interposed between the proof body and the resonator, said decoupling structure including a decoupling mass, a first connecting element between the decoupling mass and the proof body, a second connecting element between the decoupling mass and the resonator, the decoupling structure having a main vibration mode whose resonant frequency ω_dis such that ωa<ω_d<ω_rn, said mechanical decoupling structure forming a mechanical low-pass filter between the proof body and the resonator.