US 12,000,858 B2
Vibration rectification error correction device, sensor module, and vibration rectification error correction method
Masayoshi Todorokihara, Suwa (JP)
Assigned to SEIKO EPSON CORPORATION, (JP)
Filed by Seiko Epson Corporation, Tokyo (JP)
Filed on Dec. 27, 2021, as Appl. No. 17/562,052.
Claims priority of application No. 2020-219504 (JP), filed on Dec. 28, 2020.
Prior Publication US 2022/0206038 A1, Jun. 30, 2022
Int. Cl. G01P 15/097 (2006.01); G01C 19/5783 (2012.01); G01D 1/16 (2006.01); G01P 1/02 (2006.01); H03M 3/00 (2006.01)
CPC G01P 15/097 (2013.01) [G01C 19/5783 (2013.01); G01P 1/023 (2013.01); H03M 3/378 (2013.01); G01D 1/16 (2013.01); H03M 3/30 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A vibration rectification error correction device comprising:
a reference signal generation circuit that outputs a reference signal;
a frequency delta-sigma modulation circuit that performs frequency delta-sigma modulation on the reference signal by using a measured signal to generate a frequency delta-sigma modulated signal;
a first filter that operates in synchronization with the measured signal; and
a second filter that operates in synchronization with the reference signal, wherein
the first filter generates a third signal based on a first signal having a first group delay amount based on the frequency delta-sigma modulated signal and a second signal having a second group delay amount different from the first group delay amount based on the frequency delta-sigma modulated signal,
the second filter receives a signal based on the third signal and outputs a fourth signal, and
a first vibration rectification error included in a fifth signal output from the second filter when the first signal is input to the second filter and a second vibration rectification error included in a sixth signal output from the second filter when the second signal is input to the second filter have different polarities.