US 12,000,772 B2
Detector cell for a photoacoustic gas sensor and photoacoustic gas sensor
Tobias Mittereder, Munich (DE); and Christoph Glacer, Munich (DE)
Assigned to INFINEON TECHNOLOGIES AG, Neubiberg (DE)
Filed by Infineon Technologies AG, Neubiberg (DE)
Filed on Apr. 8, 2022, as Appl. No. 17/658,544.
Application 17/658,544 is a continuation of application No. 16/935,726, filed on Jul. 22, 2020, granted, now 11,346,767.
Claims priority of application No. 19193158 (EP), filed on Aug. 22, 2019.
Prior Publication US 2022/0228974 A1, Jul. 21, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. G01N 21/17 (2006.01); G01N 33/00 (2006.01)
CPC G01N 21/1702 (2013.01) [G01N 33/004 (2013.01); G01N 2021/1704 (2013.01); G01N 2021/1708 (2013.01); G01N 2223/508 (2013.01)] 26 Claims
OG exemplary drawing
 
1. A detector cell for a photoacoustic gas sensor comprising:
a first layer structure having a continuous planar top surface and a continuous planar bottom surface parallel to each other;
a second layer structure arranged at the first layer structure and comprising a membrane structure; and
a third layer structure arranged at the second layer structure;
wherein the first layer structure and the third layer structure hermetically enclose a cavity and wherein the membrane structure is arranged in the cavity, and wherein the cavity is formed by voids located in the second layer structure and the third layer structure and the continuous planar top surface forms an interior surface of the cavity, and
wherein a surface reflective for electromagnetic radiation is arranged at a surface of the first layer structure facing the membrane structure or at a surface of the third layer structure facing the membrane structure.