CPC G01L 5/16 (2013.01) [G01L 1/146 (2013.01); G01L 1/205 (2013.01); G01L 9/001 (2013.01)] | 22 Claims |
1. A device comprising:
a surface;
one or more microelectromechanical systems (MEMS) resonators mounted in proximity to the surface, so as to be stressed and thereby change in resonance frequency as the surface is engaged by a force, the one or more MEMS resonators sufficient to produce at least two electronic signals each representing a different orientation of a resonance mode axis relative to a direction of the force relative to the surface; and
circuitry to receive the at least two electronic signals, and to generate therefrom a signal representing the direction of the force relative to the surface.
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