US 11,999,827 B2
Polycarbosilazane, and composition comprising the same, and method for producing silicon-containing film using the same
Toshiya Okamura, Kakegawa (JP); Tetsuo Okayasu, Kakegawa (JP); and Thorsten Vom Stein, Darmstadt (DE)
Assigned to Merck Patent GmbH, Darmstadt (DE)
Appl. No. 17/922,800
Filed by Merck Patent GmbH, Darmstadt (DE)
PCT Filed May 4, 2021, PCT No. PCT/EP2021/061668
§ 371(c)(1), (2) Date Nov. 2, 2022,
PCT Pub. No. WO2021/224224, PCT Pub. Date Nov. 11, 2021.
Claims priority of application No. 20173584 (EP), filed on May 7, 2020.
Prior Publication US 2023/0174724 A1, Jun. 8, 2023
Int. Cl. C08G 77/60 (2006.01); C08G 77/62 (2006.01); C09D 183/16 (2006.01)
CPC C08G 77/60 (2013.01) [C08G 77/62 (2013.01); C09D 183/16 (2013.01)] 14 Claims
 
1. A polycarbosilazane comprising a repeating unit represented by the following formula (1) and a repeating unit represented by the following formula (2):

OG Complex Work Unit Chemistry
wherein,
R1, R2, R3 and R4 are each independently a single bond, hydrogen or C1-4 alkyl;
R5 is independently a single bond or hydrogen;
and n is 1-2;
wherein a ratio of an integrated intensity between 1.7 and 2.2 ppm with respect to sum of an integrated intensity between 1.7 and 2.2 ppm and an integrated intensity between 1.0 and 1.6 ppm in 1H-NMR spectrum is 0.05 to 0.5;
wherein the polycarbosilazane is free of Si-Si bonds and
wherein the mass average molecular weight is 1,500 to 25,000 measured by gel permeation chromatography in terms of polystyrene.