US 11,999,756 B2
Method for producing organometallic compound and thin film fabricated using organometallic compound obtained thereby
Jin-Hyung Seo, Jeollabuk-do (KR); Mi-Ra Park, Jeollabuk-do (KR); Jang-Hyeon Seok, Sejong-si (KR); Jung-Woo Park, Seoul (KR); Hyung-Jun Kim, Seoul (KR); Tae-Wook Nam, Seoul (KR); and Yu-Jin Lee, Seoul (KR)
Assigned to HANSOL CHEMICAL CO., LTD., Seoul (KR); and Industry-Academic Cooperation Foundation, Yonsei University, Seoul (KR)
Filed by HANSOL CHEMICAL CO., LTD., Seoul (KR); and Industry-Academic Cooperation Foundation, Yonsei University, Seoul (KR)
Filed on Apr. 18, 2022, as Appl. No. 17/722,654.
Claims priority of application No. 10-2021-0052409 (KR), filed on Apr. 22, 2021.
Prior Publication US 2022/0356198 A1, Nov. 10, 2022
Int. Cl. C07F 11/00 (2006.01); C07F 17/00 (2006.01); C23C 30/00 (2006.01)
CPC C07F 17/00 (2013.01) [C23C 30/00 (2013.01)] 5 Claims
 
1. A method for producing an organometallic compound, the method comprising a first step of synthesizing a compound of the following Formula 2 by allowing a metal hexacarbonyl compound to react with a compound of the following Formula 1;
a second step of synthesizing a compound of the following Formula 4 by allowing the compound of Formula 2 to react with a compound of the following Formula 3;
a third step of synthesizing a compound of the following Formula 6 by allowing the compound of Formula 4 to react with a compound of the following Formula 5,

OG Complex Work Unit Chemistry

OG Complex Work Unit Chemistry

OG Complex Work Unit Chemistry
wherein
R1 to R3 are each independently hydrogen or a linear or branched hydrocarbon having 1 to 4 carbon atoms,
R4 is hydrogen or a linear or branched hydrocarbon having 1 to 3 carbon atoms,
R5 and R6 are each independently hydrogen or a linear or branched hydrocarbon having 1 to 4 carbon atoms,
R7 to R9 are hydrogen, and
M is tungsten (W).