US 11,999,016 B2
Methods of forming parts using laser machining
Arun S. Veeramani, Vista, CA (US); Heath A. Jensen, Los Angeles, CA (US); Uri Frodis, Los Angeles, CA (US); Christopher G. Wiita, Pasadena, CA (US); Michael S. Lockard, Lake Elizabeth, CA (US); Irina Boguslavsky, Arcadia, CA (US); Pavel Lembrikov, Santa Monica, CA (US); Dennis R. Smalley, Newhall, CA (US); and Richard T. Chen, San Jose, CA (US)
Assigned to Microfabrica Inc., Van Nuys (CA)
Filed by Microfabrica Inc., Van Nuys, CA (US)
Filed on Apr. 18, 2022, as Appl. No. 17/723,348.
Application 15/851,605 is a division of application No. 14/720,719, filed on May 22, 2015, granted, now 9,878,401, issued on Jan. 30, 2018.
Application 17/723,348 is a continuation of application No. 15/851,605, filed on Dec. 21, 2017, abandoned.
Application 14/720,719 is a continuation in part of application No. 14/660,903, filed on Mar. 17, 2015, abandoned.
Application 14/660,903 is a continuation in part of application No. 14/333,476, filed on Jul. 16, 2014, abandoned.
Application 14/333,476 is a continuation in part of application No. 14/156,437, filed on Jan. 15, 2014, granted, now 9,533,376, issued on Jan. 3, 2017.
Claims priority of provisional application 62/058,075, filed on Sep. 30, 2014.
Claims priority of provisional application 62/058,086, filed on Sep. 30, 2014.
Claims priority of provisional application 62/002,104, filed on May 22, 2014.
Claims priority of provisional application 62/002,099, filed on May 22, 2014.
Claims priority of provisional application 61/954,507, filed on Mar. 17, 2014.
Claims priority of provisional application 61/888,060, filed on Oct. 8, 2013.
Claims priority of provisional application 61/846,745, filed on Jul. 16, 2013.
Claims priority of provisional application 61/807,816, filed on Apr. 3, 2013.
Claims priority of provisional application 61/752,596, filed on Jan. 15, 2013.
Prior Publication US 2023/0201968 A1, Jun. 29, 2023
Int. Cl. B23K 26/38 (2014.01); B23K 26/382 (2014.01); C25D 5/02 (2006.01); C25D 5/48 (2006.01); C25D 7/00 (2006.01); G01R 1/067 (2006.01); G01R 3/00 (2006.01); B23K 103/00 (2006.01)
CPC B23K 26/38 (2013.01) [B23K 26/382 (2015.10); C25D 5/028 (2013.01); C25D 5/48 (2013.01); C25D 7/00 (2013.01); G01R 1/06744 (2013.01); G01R 3/00 (2013.01); B23K 2103/56 (2018.08)] 20 Claims
OG exemplary drawing
 
1. A method of forming at least one structure, comprising:
a) providing at least one structural material comprising a sheet material and having a front side and a backside;
b) depositing one or more layers of a front structural material on the front side and one or more layers of a back structural material on the backside;
c) depositing one or more layers of a capping sacrificial material on the front structural material and one or more layers of a bridging sacrificial material on the back structural material;
d) bonding the bridging sacrificial material to a substrate via a bonding material;
e) using a laser beam to cut completely through the capping sacrificial material, the front structural material, the structural material, and the back structural material, and partially into the bridging sacrificial material while not cutting into the bonding material and the substrate, using a plurality of cutting paths around the at least one structure, wherein the plurality of cutting paths define a boundary of the at least one structures and are offset from the boundary, and wherein at least two of the cutting paths for the at least one structure have different offsets that provide for cut regions that partially overlap with each other;
f) removing the bridging sacrificial material, the bonding material, and the substrate, wherein a resulting cutting depth from the plurality of cutting paths for the at least one structure result in a differential cutting depth which is deeper near the boundary and shallower at at least some locations further removed from the boundary.