CPC B08B 3/12 (2013.01) [B08B 3/10 (2013.01); G01N 1/32 (2013.01); G01N 1/34 (2013.01); H01L 21/67057 (2013.01); H01L 21/68721 (2013.01); H01L 21/68764 (2013.01); H01L 21/68771 (2013.01); H01L 21/68792 (2013.01); A47L 2601/17 (2013.01)] | 7 Claims |
1. A rinsing apparatus configured to rinse materialographic samples, comprising:
a sample holder configured to receive materialographic samples, wherein the materialographic samples comprise at least one of metal, polymer or ceramic samples that have been cut and subjected to at least one of a grinding or lapping procedure;
a rotation head configured to rotate the sample holder;
a vessel configured to receive the sample holder and a rinsing liquid,
means for filling and emptying the vessel with rinsing liquid;
means for applying ultrasound to the rinsing liquid; and
control means configured to control at least one of:
filling of the vessel with a rinsing liquid by injecting rinsing liquid through an inlet provided in the vessel to submerge the materialographic samples in the rinsing liquid,
subjecting the rinsing liquid and the materialographic samples to ultrasound, or
rotating the sample holder including the materialographic samples relative to the vessel,
wherein the rinsing apparatus further comprises one or more clamps to maintain the materialographic samples in the sample holder during rotation of the sample holder.
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