US 11,998,945 B2
Methods and systems to monitor, control, and synchronize dispense systems
Joshua Hooge, Austin, TX (US); Michael Carcasi, Austin, TX (US); and Mark Somervell, Hillsboro, OR (US)
Assigned to Tokyo Electron Limited, Tokyo (JP)
Filed by Tokyo Electron Limited, Tokyo (JP)
Filed on Sep. 29, 2020, as Appl. No. 17/037,073.
Claims priority of provisional application 62/930,090, filed on Nov. 4, 2019.
Prior Publication US 2021/0129174 A1, May 6, 2021
Int. Cl. B05C 11/10 (2006.01); B05C 5/02 (2006.01); B05C 13/02 (2006.01); B05D 1/00 (2006.01); B05D 1/26 (2006.01); G05D 7/06 (2006.01); H01L 21/67 (2006.01)
CPC B05D 1/005 (2013.01) [B05C 5/0225 (2013.01); B05C 11/1013 (2013.01); B05C 11/1023 (2013.01); B05C 13/02 (2013.01); B05D 1/26 (2013.01); G05D 7/0641 (2013.01); H01L 21/67017 (2013.01); H01L 21/67051 (2013.01); H01L 21/67253 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A method to dispense liquid for a microelectronic workpiece processing system, comprising:
receiving a liquid to be dispensed with a dispense system;
dispensing the liquid on a microelectronic workpiece;
rotating the microelectronic workpiece at a spin rate during the dispensing;
sensing a flow rate for the liquid during the dispensing, wherein the sensing the flow rate occurs at a flow rate sample rate of at least one sample every 50 milliseconds or less; and
synchronizing the flow rate and the spin rate.