CPC B05D 1/005 (2013.01) [B05C 5/0225 (2013.01); B05C 11/1013 (2013.01); B05C 11/1023 (2013.01); B05C 13/02 (2013.01); B05D 1/26 (2013.01); G05D 7/0641 (2013.01); H01L 21/67017 (2013.01); H01L 21/67051 (2013.01); H01L 21/67253 (2013.01)] | 19 Claims |
1. A method to dispense liquid for a microelectronic workpiece processing system, comprising:
receiving a liquid to be dispensed with a dispense system;
dispensing the liquid on a microelectronic workpiece;
rotating the microelectronic workpiece at a spin rate during the dispensing;
sensing a flow rate for the liquid during the dispensing, wherein the sensing the flow rate occurs at a flow rate sample rate of at least one sample every 50 milliseconds or less; and
synchronizing the flow rate and the spin rate.
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