US 12,324,355 B2
Acoustic wave device
Takashi Yamane, Nagaokakyo (JP); Sho Nagatomo, Nagaokakyo (JP); Tetsuya Kimura, Nagaokakyo (JP); Katsuya Daimon, Nagaokakyo (JP); and Takuya Koyanagi, Nagaokakyo (JP)
Assigned to MURATA MANUFACTURING CO., LTD., Kyoto (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Mar. 26, 2022, as Appl. No. 17/705,308.
Application 17/705,308 is a continuation in part of application No. PCT/JP2020/036400, filed on Sep. 25, 2020.
Claims priority of application No. 2019-178098 (JP), filed on Sep. 27, 2019.
Prior Publication US 2022/0216392 A1, Jul. 7, 2022
Int. Cl. H03H 9/145 (2006.01); H03H 9/02 (2006.01); H03H 9/13 (2006.01); H03H 9/17 (2006.01); H03H 9/25 (2006.01); H03H 9/56 (2006.01); H10N 30/87 (2023.01); H10N 30/076 (2023.01)
CPC H10N 30/874 (2023.02) [H03H 9/02031 (2013.01); H03H 9/02228 (2013.01); H03H 9/132 (2013.01); H03H 9/145 (2013.01); H03H 9/174 (2013.01); H03H 9/175 (2013.01); H03H 9/176 (2013.01); H03H 9/25 (2013.01); H03H 9/562 (2013.01); H03H 9/564 (2013.01); H03H 9/568 (2013.01); H10N 30/076 (2023.02)] 22 Claims
OG exemplary drawing
 
1. An acoustic wave device comprising:
a piezoelectric layer; and
a first electrode and a second electrode facing each other in a direction crossing a thickness direction of the piezoelectric layer; wherein
the acoustic wave device utilizes a bulk wave of a thickness slip first-order mode, and includes a first resonator and a second resonator;
each of the first resonator and the second resonator includes the first electrode, the second electrode, and a setting portion at which the first electrode and the second electrode are provided in the piezoelectric layer;
a thickness of the first resonator excludes a thickness of the first electrode and the second electrode included in the first resonator in the setting portion of the first resonator;
a thickness of the second resonator excludes the thickness of the first electrode and the second electrode included in the second resonator in the setting portion of the second resonator;
the thickness of the first resonator is different from the thickness of the second resonator;
a material of the piezoelectric layer is lithium niobate or lithium tantalate;
Euler angles (ϕ, θ, ψ) of the lithium niobate or the lithium tantalate fall within a range of expression (1), expression (2), or expression (3):
(0°±10°,0° to 20°, any ψ)  (1);
(0°±10°,20° to 80°,0° to 60°(1−(θ−50)2/900)1/2) or (0°±10°,20° to 80°,[180°−60°(1(θ−50)2/900)1/2] to) 180°  (2); or
(0°±10°,[180°−30°(1−(ψ−90)2/8100)1/2] to 180°, any ψ)  (3).