US 12,324,153 B2
Stacked type semiconductor memory device with varying widths in the insulating member and pillars
Kotaro Noda, Yokkaichi (JP)
Assigned to KIOXIA CORPORATION, Tokyo (JP)
Filed by KIOXIA CORPORATION, Tokyo (JP)
Filed on Sep. 29, 2023, as Appl. No. 18/477,604.
Application 18/477,604 is a continuation of application No. 17/204,293, filed on Mar. 17, 2021, granted, now 11,805,648.
Application 17/204,293 is a continuation of application No. 16/864,876, filed on May 1, 2020, granted, now 10,991,720, issued on Apr. 27, 2021.
Application 16/864,876 is a continuation of application No. 16/132,169, filed on Sep. 14, 2018, granted, now 10,685,974, issued on Jun. 16, 2020.
Application 16/132,169 is a continuation of application No. 15/629,193, filed on Jun. 21, 2017, granted, now 10,103,168, issued on Oct. 16, 2018.
Application 15/629,193 is a continuation of application No. 14/645,672, filed on Mar. 12, 2015, granted, now 9,716,103, issued on Jul. 25, 2017.
Claims priority of provisional application 62/047,835, filed on Sep. 9, 2014.
Prior Publication US 2024/0023334 A1, Jan. 18, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. H10B 43/27 (2023.01); H10B 43/35 (2023.01)
CPC H10B 43/27 (2023.02) [H10B 43/35 (2023.02)] 6 Claims
OG exemplary drawing
 
1. A semiconductor memory device comprising:
a stacked body including a plurality of insulating films and a plurality of first electrode films alternately stacked in a first direction;
an insulating member extending through the stacked body in the first direction and extending in the stacked body in a second direction crossing the first direction, and separating the stacked body in a third direction crossing the first direction and the second direction;
a first pillar including a semiconductor, and extending through the stacked body in the first direction;
a bit line extending in the third direction below the stacked body and electrically connected to a lower end of the first pillar; and
a source line extending in the third direction above the bit line and electrically connected to an upper end of the first pillar, wherein the insulating member includes a lower portion, an upper portion, and a middle portion between the lower portion and the upper portion,
the lower portion has a first width in the third direction,
the upper portion has a second width in the third direction,
the middle portion has a third width in the third direction,
the third width is greater than the first width and the second width, and
the first width is greater than the second width.