US 12,324,061 B2
Epitaxial deposition chamber
Shu-Kwan Lau, Sunnyvale, CA (US); Brian Hayes Burrows, San Jose, CA (US); Zhiyuan Ye, San Jose, CA (US); Richard O. Collins, Santa Clara, CA (US); Enle Choo, Saratoga, CA (US); Danny D. Wang, San Jose, CA (US); Shainish Nellikka, Bangalore (IN); Toshiyuki Nakagawa, Narita (JP); Abhishek Dube, Fremont, CA (US); Ala Moradian, Sunnyvale, CA (US); and Kartik Bhupendra Shah, Saratoga, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Apr. 6, 2021, as Appl. No. 17/223,940.
Prior Publication US 2022/0322492 A1, Oct. 6, 2022
Int. Cl. H05B 3/00 (2006.01)
CPC H05B 3/0047 (2013.01) 20 Claims
OG exemplary drawing
 
1. A process chamber comprising:
a chamber body including a ceiling disposed above a floor, the ceiling and the floor forming boundaries of a processing volume;
an upper heating module coupled to the chamber body above the ceiling, the upper heating module including:
a first heating lamp assembly, the first heating lamp assembly including:
a first linear heating lamp extending above a peripheral portion of the ceiling and having a first horizontal length; and
a second linear heating lamp extending above a central portion of the ceiling and having a second horizontal length greater than the first horizontal length; and
a lower heating module coupled to the chamber body below the floor, the lower heating module including:
a second heating lamp assembly, the second heating lamp assembly including:
a third linear heating lamp having a third horizontal length; and
a fourth linear heating lamp having a fourth horizontal length different from the third horizontal length;
a lower reflector plate disposed below the floor; and
an annular heat shield disposed around and extending above the second heating lamp assembly and the lower reflector plate;
wherein the entire length of each of the first linear heating lamp, the second linear heating lamp, the third linear heating lamp, and the fourth linear heating lamp is linear.