US 12,323,753 B2
Micro-electro-mechanical system structure
Chih-Yuan Chen, Tainan (TW); Feng-Chia Hsu, Tainan (TW); Chun-Kai Mao, Tainan (TW); Jien-Ming Chen, Tainan (TW); Wen-Shan Lin, Tainan (TW); and Nai-Hao Kuo, Tainan (TW)
Assigned to FORTEMEDIA, INC., Alviso, CA (US)
Filed by Fortemedia, Inc., Santa Clara, CA (US)
Filed on Sep. 19, 2022, as Appl. No. 17/933,208.
Claims priority of provisional application 63/325,745, filed on Mar. 31, 2022.
Prior Publication US 2023/0319450 A1, Oct. 5, 2023
Int. Cl. H04R 19/04 (2006.01); H04R 1/08 (2006.01); H04R 7/04 (2006.01); H04R 19/00 (2006.01); H04R 19/01 (2006.01)
CPC H04R 1/08 (2013.01) [H04R 7/04 (2013.01); H04R 2201/003 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A micro-electro-mechanical system structure, comprising:
a substrate having an opening portion;
a backplate disposed on one side of the substrate and having acoustic holes;
a diaphragm disposed between the substrate and the backplate, extending across the opening portion of the substrate, and comprising a ventilation hole, wherein an air gap is formed between the diaphragm and the backplate; and
a protrusion extending into the air gap, wherein from a top view of the micro-electro-mechanical system structure, the protrusion is formed as a closed pattern, and the closed pattern surrounds at least a portion of the ventilation hole.