US 12,323,127 B2
Composite substrate, elastic wave element, and production method for composite substrate
Yuji Hori, Owariasahi (JP); and Takahiro Yamadera, Nagoya (JP)
Assigned to NGK INSULATORS, LTD., Nagoya (JP)
Filed by NGK INSULATORS, LTD., Nagoya (JP)
Filed on Dec. 9, 2021, as Appl. No. 17/546,551.
Application 17/546,551 is a continuation of application No. PCT/JP2020/006280, filed on Feb. 18, 2020.
Claims priority of application No. 2019-108403 (JP), filed on Jun. 11, 2019.
Prior Publication US 2022/0103156 A1, Mar. 31, 2022
Int. Cl. H03H 9/02 (2006.01); H03H 3/08 (2006.01); H03H 9/25 (2006.01)
CPC H03H 9/02574 (2013.01) [H03H 3/08 (2013.01); H03H 9/02559 (2013.01); H03H 9/25 (2013.01)] 5 Claims
OG exemplary drawing
 
1. A composite substrate comprising:
a supporting substrate comprising quartz;
a piezoelectric material substrate;
a first amorphous layer present between said supporting substrate and said piezoelectric material substrate; and
a second amorphous layer present between said supporting substrate and said first amorphous layer,
wherein said first amorphous layer contains 10 to 30 atom % of silicon atoms, and
wherein said second amorphous layer contains 1 to 10 atom % of fluorine atoms.