US 12,323,074 B2
RF band power supply device and pulse width modulation control method
Itsuo Yuzurihara, Yokohama (JP); Tomohiro Yoneyama, Yokohama (JP); Shohei Kobayashi, Yokohama (JP); and Yu Hosoyamada, Yokohama (JP)
Assigned to KYOSAN ELECTRIC MFG. CO., LTD.
Appl. No. 18/281,023
Filed by KYOSAN ELECTRIC MFG. CO., LTD., Yokohama (JP)
PCT Filed Dec. 17, 2021, PCT No. PCT/JP2021/046862
§ 371(c)(1), (2) Date Sep. 8, 2023,
PCT Pub. No. WO2022/190515, PCT Pub. Date Sep. 15, 2022.
Claims priority of application No. 2021-036852 (JP), filed on Mar. 9, 2021.
Prior Publication US 2024/0297594 A1, Sep. 5, 2024
Int. Cl. H02M 7/527 (2006.01); H02M 1/00 (2007.01); H02M 1/12 (2006.01); H02M 7/5387 (2007.01)
CPC H02M 7/527 (2013.01) [H02M 1/0025 (2021.05); H02M 1/12 (2013.01); H02M 7/53871 (2013.01)] 10 Claims
OG exemplary drawing
 
1. An RF band power supply device, comprising:
a DC power source;
a single-phase PWM inverter that comprises a single-phase full-bridge circuit formed by parallel-connecting two legs having switching elements on upper and lower arms between a positive end and a negative end of the DC power source, and convert a DC input supplied from the DC power source into an AC output by an ON/OFF operation of each switching element; and
an inverter controller that compares a modulation wave with a carrier wave to generate a gate signal, and turns on and off the switching element by using the gate signal as a PWM pulse signal, so as to perform pulse width modulation (PWM) control on the single-phase PWM inverter,
wherein the inverter controller comprises:
a PWM control unit and a modulation wave/carrier wave generation unit for generating the gate signal,
the modulation wave/carrier wave generation unit sets a modulation wave frequency fs of the modulation wave as a frequency in an RF band,
wherein the modulation wave/carrier wave generation unit further comprises:
a frequency synchronization unit that makes a carrier wave frequency fc of the carrier wave to be even-number N times higher than the modulation wave frequency fs;
an odd function control unit that controls the modulation wave to be a sine wave of an odd function and the carrier wave to be a triangular wave of an odd function; and
a phase synchronization unit that synchronizes a phase of the carrier wave with a phase of the modulation wave in each period of the modulation wave.