US 12,322,666 B2
Package assembly lid and methods for forming the same
Yu-Sheng Lin, Zhubei (TW); Shu-Shen Yeh, Taoyuan (TW); Chien-Shen Chen, Hsinchu (TW); Po-Yao Lin, Zhudong Township (TW); Shin-Puu Jeng, Po-Shan Village (TW); Ming-Chih Yew, Hsinchu (TW); Chin-Hua Wang, New Taipei (TW); Po-Chen Lai, Hsinchu (TW); and Chia-Kuei Hsu, Hsinchu (TW)
Assigned to Taiwan Semiconductor Manufacturing Company Limited, Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Company Limited, Hsinchu (TW)
Filed on May 23, 2022, as Appl. No. 17/750,428.
Prior Publication US 2023/0378007 A1, Nov. 23, 2023
Int. Cl. H01L 23/10 (2006.01); H01L 21/48 (2006.01); H01L 23/00 (2006.01); H01L 23/055 (2006.01); H01L 25/065 (2023.01)
CPC H01L 23/055 (2013.01) [H01L 21/4871 (2013.01); H01L 23/10 (2013.01); H01L 25/0655 (2013.01); H01L 24/16 (2013.01); H01L 24/32 (2013.01); H01L 24/73 (2013.01); H01L 2224/16235 (2013.01); H01L 2224/32225 (2013.01); H01L 2224/73204 (2013.01); H01L 2924/15311 (2013.01); H01L 2924/1611 (2013.01); H01L 2924/16153 (2013.01); H01L 2924/16251 (2013.01); H01L 2924/1631 (2013.01); H01L 2924/1632 (2013.01); H01L 2924/1811 (2013.01); H01L 2924/182 (2013.01); H01L 2924/35121 (2013.01)] 20 Claims
OG exemplary drawing
 
14. A package lid for a package assembly, comprising:
an outer lid including an outer lid material and including an outer lid plate portion comprising:
an outer lid recessed portion in a bottom surface of the outer lid plate portion; and
an outer lid non-recessed portion in the bottom surface of the outer lid plate portion, and including a plurality of outwardly-projecting portions projecting outwardly from the outer lid non-recessed portion; and
an inner lid including an inner lid material having a coefficient of thermal expansion (CTE) less than a coefficient of thermal expansion of the outer lid, and including an inner lid plate portion attached to the outer lid recessed portion, the inner lid plate portion comprising:
a central region including an opening, the outer lid non-recessed portion being inserted into the opening; and
a plurality of inwardly-projecting portions projecting inwardly into the opening, and having an interdigitated arrangement with the plurality of outwardly-projecting portions of the outer lid non-recessed portion.