US 12,322,629 B2
Transfer apparatus and transfer method
Tomonori Horiuchi, Nirasaki (JP); and Dongwei Li, Nirasaki (JP)
Assigned to Tokyo Electron Limited, Tokyo (JP)
Filed by Tokyo Electron Limited, Tokyo (JP)
Filed on Sep. 2, 2021, as Appl. No. 17/446,739.
Claims priority of application No. 2020-151787 (JP), filed on Sep. 10, 2020.
Prior Publication US 2022/0076977 A1, Mar. 10, 2022
Int. Cl. H01L 21/677 (2006.01); B25J 11/00 (2006.01); B25J 15/00 (2006.01); B65G 49/06 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01)
CPC H01L 21/67754 (2013.01) [B25J 11/0095 (2013.01); B25J 15/0052 (2013.01); B65G 49/061 (2013.01); B65G 49/067 (2013.01); H01L 21/67196 (2013.01); H01L 21/67259 (2013.01); H01L 21/67742 (2013.01); H01L 21/67745 (2013.01); H01L 21/68707 (2013.01); B65G 2203/0233 (2013.01); B65G 2203/044 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A transfer apparatus that transfers a first substrate and a second substrate while holding the first substrate and the second substrate to overlap each other in a vertical direction, the transfer apparatus comprising:
a first holding arm configured to hold the first substrate in a horizontal direction;
a second holding arm configured to hold the second substrate in the horizontal direction;
a first detection sensor configured to detect presence/absence of the first substrate held by the first holding arm; and
a second detection sensor configured to detect presence/absence of the second substrate held by the second holding arm,
wherein the first detection sensor and the second detection sensor are arranged in one side of the first holding arm in the vertical direction,
wherein the second holding arm is arranged in the other side of the first holding arm in the vertical direction,
wherein at least the first detection sensor includes a sensor configured to detect the presence/absence of the first substrate by projecting an optical axis based on the second holding arm as a reference surface and detecting a difference in a light-receiving position between a diffused and reflected light beam from the reference surface and a diffused and reflected light beam from a substrate,
wherein the first holding arm includes a notch formed at least at an inner end portion of a tip of the first holding arm and configured to allow the optical axis projected to the second holding arm to pass therethrough, and
wherein the second detection sensor is configured to detect the presence/absence of the second substrate by projecting an optical axis based on an inner wall surface of a housing of the transfer apparatus as a reference surface.