US 12,322,624 B2
Storage shelf
Tatsuo Tsubaki, Ise (JP)
Assigned to Murata Machinery, Ltd., Kyoto (JP)
Appl. No. 17/908,145
Filed by Murata Machinery, Ltd., Kyoto (JP)
PCT Filed Jan. 19, 2021, PCT No. PCT/JP2021/001632
§ 371(c)(1), (2) Date Aug. 30, 2022,
PCT Pub. No. WO2021/176865, PCT Pub. Date Sep. 10, 2021.
Claims priority of application No. 2020-037929 (JP), filed on Mar. 5, 2020.
Prior Publication US 2023/0134774 A1, May 4, 2023
Int. Cl. H01L 21/673 (2006.01); B65G 1/02 (2006.01)
CPC H01L 21/67389 (2013.01) [B65G 1/02 (2013.01); B65G 2201/0297 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A storage shelf comprising:
a main frame;
a plurality of shelf modules each having a base plate detachably provided on the main frame, and a supply nozzle provided on the base plate;
a main pipe through which purge gas supplied from a supply source flows; and
a first branch provided in the main pipe and branches a flow path from the main pipe, wherein
the shelf modules are each provided with a mass flow controller configured to adjust a flow rate of the purge gas supplied to the supply nozzle,
the first branch is connected to a module pipe via an open/close valve that opens/closes the flow path,
the module pipe is connected to the supply nozzle via the mass flow controller,
the supply nozzle is connected to the main pipe via the open/close valve and the mass flow controller, and
the module pipe is detachably provided on the main frame.