US 12,322,617 B2
Dual zone heaters for metallic pedestals
Sairam Sundaram, E Niskayuna, NY (US); Aaron Durbin, Portland, OR (US); and Ramesh Chandrasekharan, Portland, OR (US)
Assigned to LAM RESEARCH CORPORATION, Fremont, CA (US)
Filed by LAM RESEARCH CORPORATION, Fremont, CA (US)
Filed on Feb. 16, 2024, as Appl. No. 18/443,906.
Application 18/443,906 is a continuation of application No. 17/256,677, granted, now 11,908,715, previously published as PCT/US2019/040416, filed on Jul. 2, 2019.
Claims priority of provisional application 62/694,171, filed on Jul. 5, 2018.
Prior Publication US 2024/0194506 A1, Jun. 13, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 21/31 (2006.01); H01L 21/469 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01)
CPC H01L 21/67248 (2013.01) [H01L 21/68714 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A substrate processing system comprising:
a substrate support including N zones and N resistive heaters, respectively, where N is an integer greater than one, and a temperature sensor located in one of the N zones; and
a controller configured to:
calculate N resistances of the N resistive heaters during operation; and
adjust power to N−1 of the N resistive heaters during operation of the substrate processing system in response to:
a temperature measured by the temperature sensor located in the one of the N zones; and
the N resistances of the N resistive heaters.