US 12,322,613 B2
Pressure heating apparatus
Tatsuya Ishimoto, Kanagawa (JP); Akihiro Komatsu, Tokyo (JP); Takahiro Tokumiya, Kanagawa (JP); Joongha Lee, Suwon-si (KR); and Youngbum Kim, Yongin-si (KR)
Assigned to SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed by SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed on Aug. 6, 2020, as Appl. No. 16/987,042.
Claims priority of application No. 2019-145415 (JP), filed on Aug. 7, 2019; and application No. 10-2020-0071858 (KR), filed on Jun. 12, 2020.
Prior Publication US 2021/0043478 A1, Feb. 11, 2021
Int. Cl. H01L 21/67 (2006.01); H01L 21/324 (2006.01); H01L 21/687 (2006.01)
CPC H01L 21/67115 (2013.01) [H01L 21/324 (2013.01); H01L 21/67248 (2013.01); H01L 21/68785 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A pressure heating apparatus that pressurizes and heats an object in a chamber, the pressure heating apparatus comprising:
a stage onto which the object is loaded;
a heating light source that faces the stage, wherein the heating light source heats the object in a non-contact manner while irradiating light onto the object;
a lower reflector disposed around the stage, wherein the lower reflector is tilted and extends away from the stage and the object, wherein the lower reflector reflects light emitted from the heating light source toward the object;
an upper reflector located on a side opposite to a stage-facing side of the heating light source, wherein the upper reflector reflects light emitted from the heating light source toward the object; and
a shutter plate located between the object and the heating light source, wherein the shutter plate slides in horizontal direction and switches between a first mode that irradiates light to the object and a second mode that blocks light to the object, wherein the object is located between the stage and the shutter plate,
wherein the upper reflector comprises:
a first portion substantially parallel to an upper surface of the stage; and
a second portion tilted relative to the first portion,
wherein a degree of tilt of the second portion is adjusted such that light emitted from the heating light source is reflected by the second portion and then directed to the object,
wherein a reflective surface of the lower reflector reflects a first light of the light emitted from the heating light source toward the upper reflector, and
wherein the degree of tilt of the second portion is adjusted such that the first light reflected by the lower reflector is reflected by the upper reflector back toward the object.