US 12,322,579 B2
Metal contamination reduction in substrate processing systems with transformer coupled plasma
Maolin Long, Santa Clara, CA (US); Neema Rastgar, San Jose, CA (US); and Alexander Miller Paterson, San Jose, CA (US)
Assigned to Lam Research Corporation, Fremont, CA (US)
Filed by Lam Research Corporation, Fremont, CA (US)
Filed on Jun. 30, 2021, as Appl. No. 17/363,870.
Application 17/363,870 is a division of application No. 16/238,926, filed on Jan. 3, 2019, granted, now 11,056,321.
Prior Publication US 2021/0327689 A1, Oct. 21, 2021
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 21/306 (2006.01); H01J 37/32 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01)
CPC H01J 37/32871 (2013.01) [H01J 37/321 (2013.01); H01J 37/3211 (2013.01); H01J 37/32119 (2013.01); H01J 37/32449 (2013.01); H01J 37/32651 (2013.01); H01L 21/67069 (2013.01); H01J 2237/334 (2013.01); H01L 21/6831 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A substrate processing system, comprising:
a processing chamber including a substrate support to support a substrate;
an inner coil including a first conductor including first terminals and a second conductor including second terminals;
an outer coil including a third conductor including third terminals and a fourth conductor including fourth terminals;
an RF source configured to supply RF power to the inner and outer coils;
a dielectric window arranged on one surface of the processing chamber adjacent to the inner and outer coils; and
a plurality of contamination reducers for reducing contamination of the substrate, including:
a first plate arranged between the dielectric window and a first one of the third terminals of the third conductor, and a first one of the fourth terminals of the fourth conductor,
a second plate arranged between the dielectric window and a first one of the first terminals of the first conductor;
a third plate arranged between the dielectric window and a second one of the third terminals of the third conductor, and a second one of the fourth terminals of the fourth conductor, and
a fourth plate arranged between the dielectric window and the second terminals of the second conductor; wherein each of the first plate, the second plate, the third plate and the fourth plate have a rectangular shape.