US 12,322,570 B2
Pulsing assembly and power supply arrangement
Andrzej Klimczak, Warsaw (PL); Andrzej Gieraltowski, Warsaw (PL); and Michal Balcerak, Marki (PL)
Assigned to TRUMPF HUETTINGER SP. Z O. O., Zielonka (PL)
Filed by TRUMPF Huettinger Sp. z o. o., Zielonka (PL)
Filed on Jan. 27, 2023, as Appl. No. 18/160,315.
Application 18/160,315 is a continuation of application No. PCT/EP2021/071165, filed on Jul. 28, 2021.
Claims priority of application No. 20461554 (EP), filed on Jul. 29, 2020.
Prior Publication US 2023/0170184 A1, Jun. 1, 2023
Int. Cl. H01J 37/00 (2006.01); H01J 37/32 (2006.01); H02J 7/34 (2006.01)
CPC H01J 37/32009 (2013.01) [H01J 37/32146 (2013.01); H01J 2237/327 (2013.01); H02J 7/345 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A pulsing assembly for delivering power to a plasma reactor having a first load between a first plasma reactor input port and a plasma reactor common port and a second load between a second plasma reactor input port and the plasma reactor common port, the pulsing assembly comprising:
a first pulsing unit comprising:
a first input port connectable to a first power source,
a pulsing assembly common port connectable to a ground and/or to the plasma reactor common port,
a first output port connectable to the first load of the plasma reactor for supplying pulses between the first output port and the pulsing assembly common port, and
a first high side switch connected to the first input port and the first output port,
a second pulsing unit comprising:
a second input port connectable to the first power source or a second power source, and
a second output port connectable to the second load of the plasma reactor for supplying pulses between the second output port and the pulsing assembly common port, and
an energy storage component connected between the first pulsing unit and the second pulsing unit.