US 12,322,568 B2
Auto-focus sensor implementation for multi-column microscopes
Nicholas Petrone, San Jose, CA (US); Lawrence Muray, Moraga, CA (US); and Alan Brodie, Palo Alto, CA (US)
Assigned to KLA Corporation, Milpitas, CA (US)
Filed by KLA Corporation, Milpitas, CA (US)
Filed on Sep. 7, 2022, as Appl. No. 17/930,332.
Prior Publication US 2024/0079203 A1, Mar. 7, 2024
Int. Cl. H01J 37/21 (2006.01); H01J 37/244 (2006.01); H01J 37/28 (2006.01); H01J 37/20 (2006.01)
CPC H01J 37/21 (2013.01) [H01J 37/244 (2013.01); H01J 37/28 (2013.01); H01J 37/20 (2013.01); H01J 2237/20235 (2013.01); H01J 2237/216 (2013.01); H01J 2237/24578 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A system comprising:
a multi-column array of scanning electron microscopes (SEMs);
an array of autofocus sensors in line with the multi-column array of scanning electron microscopes;
a controller; and
a stage configured to hold an imaging sample and to swath in multiple directions.