US 12,322,427 B2
Ferroelectric storage apparatus and manufacturing method of conductive probe
Masaaki Yanagisawa, Tokyo (JP)
Assigned to Resonac Hard Disk Corporation, Chiba (JP)
Filed by Resonac Corporation, Tokyo (JP)
Filed on Apr. 16, 2024, as Appl. No. 18/636,662.
Application 18/316,641 is a division of application No. 17/557,537, filed on Dec. 21, 2021, granted, now 11,705,157, issued on Jul. 18, 2023.
Application 18/636,662 is a continuation of application No. 18/316,641, filed on May 12, 2023, granted, now 11,990,166.
Claims priority of application No. 2020-219654 (JP), filed on Dec. 28, 2020; application No. 2020-219655 (JP), filed on Dec. 28, 2020; application No. 2020-219656 (JP), filed on Dec. 28, 2020; application No. 2020-219657 (JP), filed on Dec. 28, 2020; application No. 2020-219658 (JP), filed on Dec. 28, 2020; application No. 2020-219659 (JP), filed on Dec. 28, 2020; application No. 2020-219660 (JP), filed on Dec. 28, 2020; application No. 2020-219661 (JP), filed on Dec. 28, 2020; application No. 2020-219662 (JP), filed on Dec. 28, 2020; application No. 2020-219663 (JP), filed on Dec. 28, 2020; application No. 2020-219664 (JP), filed on Dec. 28, 2020; application No. 2020-219665 (JP), filed on Dec. 28, 2020; application No. 2021-050640 (JP), filed on Mar. 24, 2021; application No. 2021-050641 (JP), filed on Mar. 24, 2021; application No. 2021-068376 (JP), filed on Apr. 14, 2021; application No. 2021-098592 (JP), filed on Jun. 14, 2021; application No. 2021-101046 (JP), filed on Jun. 17, 2021; application No. 2021-117508 (JP), filed on Jul. 16, 2021; and application No. 2021-160168 (JP), filed on Sep. 29, 2021.
Prior Publication US 2024/0282338 A1, Aug. 22, 2024
Int. Cl. G11B 9/02 (2006.01); G11C 11/22 (2006.01); G11C 11/56 (2006.01); G11B 5/00 (2006.01)
CPC G11B 9/02 (2013.01) [G11C 11/22 (2013.01); G11C 11/221 (2013.01); G11C 11/5657 (2013.01); G11B 2005/0002 (2013.01)] 5 Claims
OG exemplary drawing
 
1. A ferroelectric storage apparatus comprising:
a ferroelectric recording medium;
a conductive probe;
a probe slider configured to cause the conductive probe to travel by floating above a surface of the ferroelectric recording medium;
a ferroelectric recording medium driver configured to rotate the ferroelectric recording medium; and
a recording-and-reproduction signal processor configured to process a write signal and a read signal of information transmitted to and received from the conductive probe,
wherein the conductive probe includes:
a base body constituted by a conductive material;
an insulating layer formed on the base body and includes a through hole; and
a needle-shaped electrode formed on the base body in the through hole and electrically connected to the recording-and-reproduction signal processor,
wherein the needle-shaped electrode is configured to write information to the ferroelectric recording medium by polarizing a ferroelectric layer of the ferroelectric recording medium by an electric field generated at a tip of the needle-shaped electrode,
wherein the needle-shaped electrode is configured to read information recorded in the ferroelectric recording medium by detecting a tunnel current flowing between the needle-shaped electrode and the ferroelectric recording medium or by detecting an atomic force between the needle-shaped electrode and the ferroelectric recording medium, and
wherein a portion of the needle-shaped electrode protrudes from a surface of the insulating layer.